Optical characterization in microelectronics manufacturing
نویسندگان
چکیده
منابع مشابه
Optical Characterization in Microelectronics Manufacturing
Texas Instruments, Inc., Dallas, TX 75243 To successfully construct semiconductor devices, the semiconductor industry must measure fundamental material parameters, especially when developing new materials; measure the quality of the material as it is grown; accutate\y determine the details of thin films, quantum wells, and other microstructures that control or affect device performance; and mea...
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ژورنال
عنوان ژورنال: Journal of Research of the National Institute of Standards and Technology
سال: 1994
ISSN: 1044-677X
DOI: 10.6028/jres.099.058